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  • Summary & Details

Development of the DLC Coating on the Anodized Aluminum

アルミ陽極酸化皮膜に対するDLC成膜技術の開発

Detailed Information

Author(J)1) 金子 史幸, 2) 角田 健一, 3) 白石 隆, 4) 三宅 浩二
Author(E)1) Shikoh Kaneko, 2) Kenichi Tsunota, 3) Takashi Shiraishi, 4) Koji Miyake
Affiliation(J)1) ケーヒン, 2) ケーヒン, 3) ケーヒン, 4) 日本アイ・ティ・エフ
Abstract(J)FFV用燃料ポンプへの適用を目指し、絶縁性のアルミ陽極酸化皮膜上へ、パルス化直流プラズマCVDによるDLC成膜技術を確立した。本稿では、陽極酸化皮膜の封孔度とボンバード処理時のデューティ比に着目し、実施した技術内容について報告する。

Translation

Abstract(E)Upon applying to fuel pumps for the FFV, it was developed that the DLC (Diamond-like carbon) coating on acid anodized aluminum by the pulsed DC plasma CVD method. This paper shows about tried technical contents which involved sealing quality of acid anodized aluminum and the duty raito during ion bombardment.

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