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  • Summary & Details

Effects of crystalline defects on degradation of SiC devices

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Category(E)Power Semiconductor and Packaging Technologies
Author(E)1) Masashi Kato
Affiliation(E)1) Nagoya Institute of Technology
Abstract(E)Silicon carbide (SiC) metal oxide semiconductor field effect transistors (MOSFETs) are promising for power devices in electric and hybrid electric vehicles. However, at present, reliability of SiC MOSFETs is still an important issue to be solved. One of the origins for degradation of SiC MOSFETs performance is expansion of basal plane dislocations (BPDs) to single Shockley stacking faults (1SSF). The expansion of 1SSFs proceeds to the epitaxial layer of SiC MOSFETs and 1SSFs act as resistive components and degrade MOSFET performance, and thus we need to suppress the expansion of BPDs. In this paper, we report on carrier recombination lifetime in 1SSF and SiC epitaxial layers to find the suppression methods of 1SSF expansion.

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